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GB/T 19921-2005 Test method of particles on silicon wafer surfaces
Standard No.: GB/T 19921-2005 Status: ABOLISHED remind me the status change
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Standard No.: GB/T 19921-2005
Chinese Name: 硅抛光片表面颗粒测试方法
English Name: Test method of particles on silicon wafer surfaces
Professional Classification: H17 Semimetal and semiconductor material analysis method
Professional Classification: GB National Standard
ICS Classification: 77.040.01 Testing of metals in general
Issued by:
Issued on: 2005-09-19
Implemented on: 2006-04-01
Status: ABOLISHED
Replace By:GB/T19921-2018 Test method for particles on polished silicon wafer surfaces
Replace By Date:2019-07-01
Language: English
File Format: PDF
Word Count:
Price(USD): please email coc@codeofchina.com for quotation
Delivery: via email in 1-3 business day
GB/T 19921-2005 The following standards are cited:
GB/T 19921-2005 Cited by the following standards:
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