General specification of ion beam etching system

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GB/T 15861-2012 General specification of ion beam etching system
Standard No.:	GB/T 15861-2012	Status:	VALID remind me the status change Email:
Language:	English	File Format:	PDF
Word Count:	8000 words	Price(USD):	240 (USD) remind me the price change Email:
Implemented on:	2013-02-15	Delivery:	via email in 1-3 business day
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Standard No.:	GB/T 15861-2012
Chinese Name:	离子束蚀刻机通用规范
English Name:	General specification of ion beam etching system
Professional Classification:	L97 Dedicated processing equipment
Issued by:
Issued on:	2012-11-05
Implemented on:	2013-02-15
Status:	VALID
Replace:	GB/T15861-1995 Generic specification of ion beam etching system
Language:	English
File Format:	PDF
Word Count:	8000 words
Price(USD):	240 (USD)
Delivery:	via email in 1-3 business day

GB/T 15861-2012 The following standards are cited：

GB/T 15861-2012 Cited by the following standards：

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