Guidelines for precision and accuracy expression for mask writing equipment

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GB/T 16879-1997 Guidelines for precision and accuracy expression for mask writing equipment
Standard No.:	GB/T 16879-1997	Status:	VALID remind me the status change Email:
Language:	English	File Format:	PDF
Word Count:		Price(USD):	please email coc@codeofchina.com for quotation remind me the price change Email:
Implemented on:	1998-03-01	Delivery:	via email in 1-3 business day
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Standard No.:	GB/T 16879-1997
Chinese Name:	掩模曝光系统精密度和准确度的表示准则
English Name:	Guidelines for precision and accuracy expression for mask writing equipment
Professional Classification:	L97 Dedicated processing equipment
Professional Classification:	GB National Standard
ICS Classification:	31.020
Issued by:
Issued on:	1997-06-20
Implemented on:	1998-03-01
Status:	VALID
Language:	English
File Format:	PDF
Word Count:
Price(USD):	please email coc@codeofchina.com for quotation
Delivery:	via email in 1-3 business day

GB/T 16879-1997 The following standards are cited：

GB/T 16879-1997 Cited by the following standards：

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