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GB/T 16879-1997 Guidelines for precision and accuracy expression for mask writing equipment
Standard No.: GB/T 16879-1997 Status: VALID remind me the status change
Language: English File Format: PDF
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Implemented on: 1998-03-01 Delivery: via email in 1-3 business day
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Standard No.: GB/T 16879-1997
Chinese Name: 掩模曝光系统精密度和准确度的表示准则
English Name: Guidelines for precision and accuracy expression for mask writing equipment
Professional Classification: L97 Dedicated processing equipment
Professional Classification: GB National Standard
ICS Classification: 31.020
Issued by:
Issued on: 1997-06-20
Implemented on: 1998-03-01
Status: VALID
Language: English
File Format: PDF
Word Count:
Price(USD): please email coc@codeofchina.com for quotation
Delivery: via email in 1-3 business day
GB/T 16879-1997 The following standards are cited:
GB/T 16879-1997 Cited by the following standards:
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