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Position: Standard Detail Info
GB/T 29844-2013 Specifications for metrology patterns for the evaluation of advanced photolithgraphy
Standard No.: GB/T 29844-2013 Status: VALID remind me the status change
Language: English File Format: PDF
Word Count: 6000 words Price(USD): 180 (USD) remind me the price change
Implemented on: 2014-04-15 Delivery: via email in 1-3 business day
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Standard No.: GB/T 29844-2013
Chinese Name: 用于先进集成电路光刻工艺综合评估的图形规范
English Name: Specifications for metrology patterns for the evaluation of advanced photolithgraphy
Professional Classification: L90 Special electronic technology material
Professional Classification: GB National Standard
Issued by:
Issued on: 2013-11-12
Implemented on: 2014-04-15
Status: VALID
Language: English
File Format: PDF
Word Count: 6000 words
Price(USD): 180 (USD)
Delivery: via email in 1-3 business day
GB/T 29844-2013 The following standards are cited：
GB/T 29844-2013 Cited by the following standards：
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