Electrical safety of machinery—Electrical equipment of machines—Part 33:Requirements for semiconductor fabrication equipment

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GB/T 5226.33-2017 Electrical safety of machinery—Electrical equipment of machines—Part 33:Requirements for semiconductor fabrication equipment
Standard No.:	GB/T 5226.33-2017	Status:	VALID remind me the status change Email:
Language:	English	File Format:	PDF
Word Count:	50000 words	Price(USD):	1500 (USD) remind me the price change Email:
Implemented on:	2018-05-01	Delivery:	via email in 1-10 business day
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Standard No.:	GB/T 5226.33-2017
Chinese Name:	机械电气安全机械电气设备第33部分：半导体设备技术条件
English Name:	Electrical safety of machinery—Electrical equipment of machines—Part 33:Requirements for semiconductor fabrication equipment
Professional Classification:	J09
ICS Classification:	29.020
Issued by:
Issued on:	2017-10-14
Implemented on:	2018-05-01
Status:	VALID
Language:	English
File Format:	PDF
Word Count:	50000 words
Price(USD):	1500 (USD)
Delivery:	via email in 1-10 business day

GB/T 5226.33-2017 The following standards are cited：

GB/T 5226.33-2017 Cited by the following standards：

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