Generic specification for ion implantation equipment

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GB/T 15862-1995 Generic specification for ion implantation equipment
Standard No.:	GB/T 15862-1995	Status:	ABOLISHED remind me the status change Email:
Language:	English	File Format:	PDF
Word Count:		Price(USD):	please email coc@codeofchina.com for quotation remind me the price change Email:
Implemented on:	1996-08-01	Delivery:	via email in 1-3 business day
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Standard No.:	GB/T 15862-1995
Chinese Name:	离子注入机通用技术条件
English Name:	Generic specification for ion implantation equipment
Professional Classification:	L97 Dedicated processing equipment
Professional Classification:	GB National Standard
ICS Classification:	31.200
Issued by:
Issued on:	1995-01-02
Implemented on:	1996-08-01
Status:	ABOLISHED
Replace By:	GB/T15862-2012 General specification of ion implantation equipment
Replace By Date:	2013-02-15
Language:	English
File Format:	PDF
Word Count:
Price(USD):	please email coc@codeofchina.com for quotation
Delivery:	via email in 1-3 business day

GB/T 15862-1995 The following standards are cited：

GB/T 15862-1995 Cited by the following standards：

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