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GB/T 15862-1995 Generic specification for ion implantation equipment
Standard No.: GB/T 15862-1995 Status: ABOLISHED remind me the status change
Language: English File Format: PDF
Word Count: Price(USD): please email coc@codeofchina.com for quotation remind me the price change
Implemented on: 1996-08-01 Delivery: via email in 1-3 business day
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Standard No.: GB/T 15862-1995
Chinese Name: 离子注入机通用技术条件
English Name: Generic specification for ion implantation equipment
Professional Classification: L97 Dedicated processing equipment
Professional Classification: GB National Standard
ICS Classification: 31.200
Issued by:
Issued on: 1995-01-02
Implemented on: 1996-08-01
Status: ABOLISHED
Replace By:GB/T15862-2012 General specification of ion implantation equipment
Replace By Date:2013-02-15
Language: English
File Format: PDF
Word Count:
Price(USD): please email coc@codeofchina.com for quotation
Delivery: via email in 1-3 business day
GB/T 15862-1995 The following standards are cited:
GB/T 15862-1995 Cited by the following standards:
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