Specification for establishing a wafer coordinate system

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GB/T 16596-1996 Specification for establishing a wafer coordinate system
Standard No.:	GB/T 16596-1996	Status:	ABOLISHED remind me the status change Email:
Language:	English	File Format:	PDF
Word Count:		Price(USD):	please email coc@codeofchina.com for quotation remind me the price change Email:
Implemented on:	1997-04-01	Delivery:	via email in 1-3 business day
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Standard No.:	GB/T 16596-1996
Chinese Name:	确定晶片坐标系规范
English Name:	Specification for establishing a wafer coordinate system
Professional Classification:	H21 Metal physical property test method
Professional Classification:	GB National Standard
ICS Classification:	29.045 Semiconducting materials
Issued by:
Issued on:	1996-01-01
Implemented on:	1997-04-01
Status:	ABOLISHED
Replace By:	GB/T16596-2019 Specification for establishing a wafer coordinate system
Replace By Date:	2020-02-01
Language:	English
File Format:	PDF
Word Count:
Price(USD):	please email coc@codeofchina.com for quotation
Delivery:	via email in 1-3 business day

GB/T 16596-1996 The following standards are cited：

GB/T 16596-1996 Cited by the following standards：

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